Aisha (may Allah be pleased with her) said: he -i.e. the prophet (may the peace and blessings of Allah be upon him)- used to say upon waking up [at night]:

Allah is the Greatest (10 times)

All Praise is for Allah (10 times)

How far from imperfections Allah is and I praise Him (10 times)

How far from imperfections The King, and The Holy One is (10 times)

I ask Allah for forgiveness (10 times)

None has the right to be worshipped except Allah (10 times)

... then he would say:

O Allah, I seek refuge with you from the hardships of this world, and the hardships of the day of resurrection (10 times)

..

then he would commence the prayer

allaahu Akbar (10 times)

al-ḥamdu-lil-laah (10 times)

subḥaan-allaahi wa biḥamdihi (10 times)

subḥaan-al-malik-il-quddoos (10 times)

astaghfirullaah (10 times)

laa ilaaha ill-allaah (10 times)

.....

allaahumma inni a‛oodhu bika min ḍeeqid dunyaa, wa ḍeeqi yawm-il qyaamah (10 times)